SOME EXPERIMENTS REGARDING MAGNETRON SPUTTERING DEPOSITION WITH SMALL CAPACITY DEVICES

Authors

  • Ioan Moga University of Oradea, Faculty of Management and Technological Engineering
  • Remus Ghincu University of Oradea, Faculty of Management and Technological Engineering
  • Traian Costea University of Oradea, Faculty of Management and Technological Engineering
  • Dan Tarca University of Oradea, Faculty of Management and Technological Engineering
  • Octavian Alin Moldovan University of Oradea, Faculty of Management and Technological Engineering

Keywords:

magnetron sputtering, electronic device testing, atomic force microscopy

Abstract

In this paper the authors describe the testing of electric devices and magnetic components which should be used to set up a magnetron sputtering system. The results of tests are presented in the form of micro and nanoscopic analysis made with optical and atomic force microscopy. The experimental installation was realized at the University of Oradea, Faculty of Management and Technological Engineering in the SMARTMAT Laboratory.

References

Downloads

Published

2018-12-31

Issue

Vol. 22 No. 4 (2018): Nonconventional Technologies Review

Section

Articles

How to Cite

SOME EXPERIMENTS REGARDING MAGNETRON SPUTTERING DEPOSITION WITH SMALL CAPACITY DEVICES. (2018). Nonconventional Technologies Review, 22(4). https://www.revtn.ro/index.php/revtn/article/view/54

Most read articles by the same author(s)